view article
Figure 3
Scanning electron micrographs of one of the prototypes of the lens arrays produced by deep X-ray lithography. The left-hand part shows an overview, while the right-hand part shows details in the lens centre. This particular lens has a prism height of h = 25.67 µm, a prism angle of γ = 35° and a geometrical aperture of A = 1.8 mm. For k = 2 this lens provides a focal length of f = 2.14 m. The array has all outermost prism walls curved identically and it was found to be etched uniformly over 0.6 mm into a 1 mm-thick SU-8 layer.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 11| Part 3| April 2004| Pages 248-253
doi:10.1107/S0909049504005825
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS