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Figure 3
Map of a Ta-film test object in which a cross pattern has been etched out. The lines of the cross are 40 µm wide. The curves above and to the right of the image are line profiles showing the resolution. The ticks on the axes are 20 µm apart.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 11| Part 3| April 2004| Pages 239-247
doi:10.1107/S0909049504005837
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