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Figure 11
High-resolution diffraction from a lithographically prepared free-standing grating of period 120 nm. The fine vertical streaks indicate the grating period, whereas the weak oblique streaks are due to scattering from the sides of the trapezoidal ridges. From the intensity distribution in the streaks, residual strain fields in the grating after etching can be determined. Reprinted from Kaganer et al. (2002BB17) with permission from the American Physical Society.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 12| Part 3| April 2005| Pages 329-339
doi:10.1107/S0909049505000361
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