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Figure 7
The positional sensitivity of the device is measured by moving the device through the beam in steps of 10 µm and 100 µm (inset) in the vertical direction. The lower panel shows the best-fit residues. |
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Figure 7
The positional sensitivity of the device is measured by moving the device through the beam in steps of 10 µm and 100 µm (inset) in the vertical direction. The lower panel shows the best-fit residues. |