Multilayer X-ray optics at CHESS

Kazimirov, A.; Smilgies, D.-M.; Shen, Q.; Xiao, X.; Hao, Q.; Fontes, E.; Bilderback, D.H.; Gruner, S.M.; Platonov, Y.; Martynov, V.V.

doi:10.1107/S0909049506002846

Journal of Synchrotron Radiation Journal of
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Figure 5
Reflectivity curves from d = 22 Å (a) and d = 15 Å (b) W/B₄C multilayers deposited on very smooth and well characterized Si (crosses) and on CVD SiC (triangles) substrates. For each pair of substrates, deposition was performed simultaneously within the same deposition cycle. MLs on SiC substrate show only slightly, ∼1%, lower maximum reflectivity.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 13| Part 2| March 2006| Pages 204-210

https://doi.org/10.1107/S0909049506002846

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