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Figure 12
Layout of the XMM pn-CCD. Twelve logically separate pn-CCDs of area 1 cm × 3 cm are monolithically combined on a 4-inch wafer to a 6 cm × 6 cm device with common back entrance window. The pixel size is 150 µm × 150 µm. |
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Figure 12
Layout of the XMM pn-CCD. Twelve logically separate pn-CCDs of area 1 cm × 3 cm are monolithically combined on a 4-inch wafer to a 6 cm × 6 cm device with common back entrance window. The pixel size is 150 µm × 150 µm. |