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Figure 13
A schematic cross section through the pn-CCD along a transfer channel. The device is back illuminated and fully depleted over 300 µm thickness. The electron potential perpendicular to the wafer surface is shown on the right-hand side. |
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Figure 13
A schematic cross section through the pn-CCD along a transfer channel. The device is back illuminated and fully depleted over 300 µm thickness. The electron potential perpendicular to the wafer surface is shown on the right-hand side. |