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Figure 1
Schematic view of (a) the alignment and (b) the monitoring system. Under the STM scanner equipped with a standard XYZ motion (a), an independent four-axis stage is set, whereas the height Yb is controlled by an air dumper. |
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Figure 1
Schematic view of (a) the alignment and (b) the monitoring system. Under the STM scanner equipped with a standard XYZ motion (a), an independent four-axis stage is set, whereas the height Yb is controlled by an air dumper. |