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Figure 4
Dependence of the function Fc on the energy E of the emitted TR photons. Fc(E) is normalized to unity for a SiC mask of thickness 2 µm and PMMA photoresist |
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Figure 4
Dependence of the function Fc on the energy E of the emitted TR photons. Fc(E) is normalized to unity for a SiC mask of thickness 2 µm and PMMA photoresist |