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Figure 6
Dependence of the XRL resist sensitivity SR as a function of the foil thickness for identical Al foil TR target in MIRRORCLE-20SX. XRL is assumed to be performed using a SiC mask of thickness 2 µm, and PMMA resist. SR is normalized to unity for the one-foil target, and results are presented for targets containing one, two and three foils.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 13| Part 4| July 2006| Pages 336-342
https://doi.org/10.1107/S0909049506015226
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