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Figure 6
Equi-tilt maps for (a) a 50 nm-thick bonded layer, (b) a 200 nm-thick bonded layer, (c) a 50 nm-thick SIMOX layer, and (d) a 200 nm-thick SIMOX layer. |
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Figure 6
Equi-tilt maps for (a) a 50 nm-thick bonded layer, (b) a 200 nm-thick bonded layer, (c) a 50 nm-thick SIMOX layer, and (d) a 200 nm-thick SIMOX layer. |