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Figure 1
Photograph of the deposition chamber: (1) feedthrough for gas inlet (to allow mixed Ar and O2 gases into the chamber), (2) pneumatically controlled shutter, (3) sputtering gun, (4) view port, (5) cold-cathode gauge, (6) needle valve to lead pure N2 gas to break the vacuum, (7) Be window port.

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ISSN: 1600-5775
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