Figure 9
X-ray metrology study of the sagittal substrate surface profile when it is bent to a sagittal radius of 1 m. The substrate was oriented to intercept the incoming X-ray beam at the Bragg angle. The upper nine panels show the X-ray beam shape in the end-station when an X-ray beam with 0.1 mm vertical size is scanned through the surface vertically. The lower six panels show the X-ray beam shape when an X-ray slit of 5 mm horizontal size is scanned through the surface horizontally. |