X-ray beamlines for structural studies at the NSRRC superconducting wavelength shifter

Song, Y.-F.; Chang, C.-H.; Liu, C.-Y.; Chang, S.-H.; Jeng, U.-S.; Lai, Y.-H.; Liu, D.-G.; Chung, S.-C.; Tsang, K.-L.; Yin, G.-C.; Lee, J.-F.; Sheu, H.-S.; Tang, M.-T.; Hwang, C.-S.; Hwu, Y.-K.; Liang, K.S.

doi:10.1107/S0909049507021516

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 7
(a) Three-dimensional tomography of a gold spoke pattern, taken with a resolution of ∼60 nm and an imaged volume of 15 µm × 15 µm × 1 µm. (b) Three-dimensional tomography of an integrated circuit (IC), taken with an imaged volume of 12.5 µm × 7.9 µm × 5.2 µm, clearly showing the hollows at the center of the IC plugs (bright rods).

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 14| Part 4| July 2007| Pages 320-325

https://doi.org/10.1107/S0909049507021516

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