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Figure 4
Pumping speed characteristics for the rotary-vane pump and the turbo-molecular pump as supplied by the respective manufacturers. Indicated are the operating points for the pumps in steady-state operation. |
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Figure 4
Pumping speed characteristics for the rotary-vane pump and the turbo-molecular pump as supplied by the respective manufacturers. Indicated are the operating points for the pumps in steady-state operation. |