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Figure 2
Flat reference mirror over a 190 mm-long trace. From top to bottom: surface figure (28 nm PV and 6.9 nm RMS), X slopes (17.4 µrad PV and 0.61 µrad RMS) and Y slopes (13.7 µrad PV and 0.99 µrad RMS). |
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Figure 2
Flat reference mirror over a 190 mm-long trace. From top to bottom: surface figure (28 nm PV and 6.9 nm RMS), X slopes (17.4 µrad PV and 0.61 µrad RMS) and Y slopes (13.7 µrad PV and 0.99 µrad RMS). |