Figure 1
Resolution test definitions. (a) The step-edge resolution test fits a Gaussian function to the first derivative of the measured profile. Resolution is given by the FWHM of the Gaussian. (b) The imaging resolution test uses Rayleigh's criterion to determine whether the peaks are resolved. (c) A micrograph of the USAF 1951 3-Bar Resolving Test Chart. The blue line indicates where the line scan was performed over the edge of the larger square for the step-edge tests. The red box shows group 8 of the test chart where an imaging test example shown in (d) was obtained. |