Figure 3
Imaging resolution test results as a function of wavelength. A fit of the data to the effective source size discussed in the text is shown in red, with the two components of the fit, diffraction and electron beam source size, shown with dashed lines. The lower figures show example profiles of the smallest bars at wavelengths of 1.11 µm (just resolved) and 1.43 µm (not resolved) and the corresponding Gaussian fits. |