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Figure 9
Resolution as a function of the X-ray energy for pitches of (a) 1 µm and (b) 4 µm. Solid lines are R90W and dashed lines are FWHM measures. |
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Figure 9
Resolution as a function of the X-ray energy for pitches of (a) 1 µm and (b) 4 µm. Solid lines are R90W and dashed lines are FWHM measures. |