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Figure 1
FIB secondary electron images of the micro test pattern. The wire axis is horizontal. (a) In-plane patterns with pitches of 16, 12, 10, 8 and 6 µm. (b) Through-plane patterns with pitches of 16, 12 and 10 µm. Scale bars: 20 µm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 15| Part 6| October 2008| Pages 648-654
doi:10.1107/S0909049508025685
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