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Figure 4
Tomograms of in-plane patterns obtained by (a–d) non-interpolated and (e-h) quadruple-interpolated reconstruction. (a, e) Pitch pattern of 6 µm; (b, f) 8 µm; (c, g) 12 µm; and (d, h) 16 µm. Linear absorption coefficients are shown in gray scale from 0 (black) to 38 cm−1 (white). Images of 10 µm pattern are shown in Fig. 3 . |


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