Figure 3
Schematics that illustrate alignment of the centers of the hexapod (OH) and the rotary stage (OR). Alignment requires finding both (a) offset between OR and OH, and (b) once they coincide, the distance from the common rotation center to the X-ray beam. The offset can be measured directly from images capture using the camera overlooking a 0.25′′ tooling ball used to indicate the center of the hexapod platform. Each pixel in the image corresponds to ∼10 µm. The measured offset is (ΔxHR, ΔyHR) = (0.54 mm, 0.75 mm). |