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![[Figure 2]](tc5008fig2mag.jpg)
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Figure 2
Photon flux at the CD sample position. The CD chamber is purged with nitrogen. The multiple peaks around 140 nm are from nitrogen absorption. |
![[Figure 2]](tc5008fig2.jpg)
 | JOURNAL OF SYNCHROTRON RADIATION |
ISSN: 1600-5775
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Figure 2
Photon flux at the CD sample position. The CD chamber is purged with nitrogen. The multiple peaks around 140 nm are from nitrogen absorption. |
| JOURNAL OF SYNCHROTRON RADIATION |
