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Figure 3
Module for spectroscopic measurements attached to the UniHead (6). 1 and 2 are ×50 objectives mounted on three-dimensional (4) and two-dimensional (5) tilt stages. A pinhole is mounted on a miniature three-dimensional stage (3). |
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Figure 3
Module for spectroscopic measurements attached to the UniHead (6). 1 and 2 are ×50 objectives mounted on three-dimensional (4) and two-dimensional (5) tilt stages. A pinhole is mounted on a miniature three-dimensional stage (3). |