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Figure 2
Schematic view of the beamline end-station consisting of the etching chamber (EC) and the focusing mirror chamber (FMC). FM2: second focusing mirror [parabolic, y = x2(4f)−1] of length 234.7 mm and focal length f = 2 mm. The distance between the mirror centre and the entrance of the aperture (A) is 360 mm. The mirror positions x, y and z and the rotation around the z axis are controlled manually. The position of the aperture is changed by the XY stage. The grazing-incidence angle of SR to the mirror is 5°.

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