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Figure 3
Schematic diagram of the gas-supplying system. P1, P2: diaphragm pressure gauges; VV1, VV2: variable leak valves; PV1, PV2: normally closed air actuator valves; V1, V2, V3: stop valves. The gas line and the etching chamber are purged by nitrogen gas.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 17| Part 1| January 2010| Pages 69-74
https://doi.org/10.1107/S0909049509045658
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