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Figure 4
Top view of the hole formed by SR etching using XeF2 gas (0.5 torr) on the PDMS substrate surface observed by optical microscope. The SR beam current and the etching time were 150 mA and 10 min. The photoemission current measured by Pt detector was ∼312 µA. The measured profile of the hole is also given.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 17| Part 1| January 2010| Pages 69-74
https://doi.org/10.1107/S0909049509045658
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