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Figure 3
Recorded X-ray images of the Si kinoform lens structures at an incident X-ray energy of 19 keV. (a) Image of a few lenses, (b) a single lens and (c) a single lens after defining the primary X-ray beam size equal to the lens aperture. From (c) it can be seen that the kinoform lens generates a well defined line-shaped X-ray beam of size 50 µm × 2 µm. In (b) and (c), the vertical size of the X-ray beam was set to ∼140 µm and 90 µm, respectively, using a beam-defining slit as shown in Fig. 2[link].

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