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Figure 5
Measured XRR profile of a Mo/Si multilayer (d = 6.52 nm, Γ = 0.378 and N = 20) at an incident X-ray energy of 19 keV under two conditions: (a) using a focused X-ray beam with kinoform lens and (b) using an unfocused X-ray beam (kinoform lens is retracted). In both cases the experimental conditions were maintained identical, and a similar aperture of the primary X-ray beam was employed. In the insets, an extended view of XRR profiles in the vicinity of the critical angle and the first Bragg peak is shown in each case.

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