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Figure 5
Measured XRR profile of a Mo/Si multilayer (d = 6.52 nm, Γ = 0.378 and N = 20) at an incident X-ray energy of 19 keV under two conditions: (a) using a focused X-ray beam with kinoform lens and (b) using an unfocused X-ray beam (kinoform lens is retracted). In both cases the experimental conditions were maintained identical, and a similar aperture of the primary X-ray beam was employed. In the insets, an extended view of XRR profiles in the vicinity of the critical angle and the first Bragg peak is shown in each case.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 17| Part 2| March 2010| Pages 237-242
https://doi.org/10.1107/S0909049509055009
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