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Figure 3
Schematic drawing of the prototype differential pumping system. Dx (x = 1–4) is the diameter of each conductance-limiting aperture, and Px (x = 0–4) is the pressure at each differential pumping stage. The arrows at the upper side indicate the length of the system. SP stands for scroll pump and TMP for turbomolecular pump.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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