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Figure 7
Spot sizes for the elliptic L-shaped laterally graded multilayer mirror. The images were taken at 10 m from the mirror. The pixel size is, approximately, 2 µm × 2 µm. The acceptance is 5 mrad × 5 mrad, the source size is 5 µm × 5 µm and the corner gap is 2 µm. (a) Perfect mirror (no slope error; no roughness, σ = 0; no random variations in the lattice parameter, Δd/d = 0). (b) Slope error 5 µrad, σ = 0.2 nm, Δd/d = 7 × 10−4. (c) Slope error 10 µrad, σ = 0.2 nm, Δd/d = 7 × 10−4. (d) Slope error 15 µrad, σ = 0.2 nm, Δd/d = 7 × 10−4. The dark diagonal line is the missing intensity owing to the corner gap.

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SYNCHROTRON
RADIATION
ISSN: 1600-5775
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