Figure 9
Flat- and dark-field-corrected images of a test pattern (Xradia, model X500-200-30) taken at the TopoTomo beamline (ANKA) utilizing an indirect detector with 2.5 µm effective pixel size (40 µm-thick CWO luminescence screen). The experiment was located approximately 30 m away from the source. Images were acquired as indicated using either the filtered white beam or after a multilayer reflection (18 keV). The images acquired with a monochromatic beam were stitched out of several single images owing to the limited height of the reflected beam (the multilayer to test-pattern distance was approximately 1 m; sample 1574: Mo/Si, N = 220, d = 2.478 nm; sample 1531: W/Si, N = 120, d = 2.528 nm; sample 1680: Pd/B4C, N = 220, d = 2.468 nm). See also Figs. 8 and 10. |