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Figure 8
Graphical representation of the calculated ZnO layer thicknesses for the different plateaus and different samples. For comparison, the calculated ZnO layer thickness d as obtained from the measured SXES emission intensities is plotted against the ellipsometrically measured layer thickness for all samples and plateaus. The results obtained from the averaged relative emission intensities of the scan measurements are in good agreement with the results from the local spot measurements. Additional (grey) background radiation can significantly alter the calculated ZnO layer thickness for low SXES emission intensities (thick absorbing ZnO layers), resulting in lower calculated layer thicknesses. This effect can clearly be seen in all samples for a layer thickness of 80 nm ZnO.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 17| Part 6| September 2010| Pages 791-798
doi:10.1107/S0909049510031444
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