|
Figure 9
Multilayer reflectivity and distribution of incidence angles for vertical and horizontal mirror surfaces. Red squares: multilayer peak at 8 mrad for a Rh/Si multilayer with 70 periods and layer thicknesses of 3 nm. Black circles: multilayer peak at 13.9 mrad for a Rh/Si multilayer with 70 periods and layer thicknesses of 1.7 nm. Blue solid line: histogram of incidence angles for vertical mirror. Green dashed line: histogram of incidence angles for horizontal mirror. The histograms were generated from the angular distributions shown in the bottom panels of Fig. 8 ![]() |