Figure 9
Multilayer reflectivity and distribution of incidence angles for vertical and horizontal mirror surfaces. Red squares: multilayer peak at 8 mrad for a Rh/Si multilayer with 70 periods and layer thicknesses of 3 nm. Black circles: multilayer peak at 13.9 mrad for a Rh/Si multilayer with 70 periods and layer thicknesses of 1.7 nm. Blue solid line: histogram of incidence angles for vertical mirror. Green dashed line: histogram of incidence angles for horizontal mirror. The histograms were generated from the angular distributions shown in the bottom panels of Fig. 8. The multilayer peaks are shifted to allow proper comparison. |