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Figure 8
Variation of thickness (left axis) and refractive index (right axis) as a function of the dose for an MTES-TEOS hybrid film. The lines are a visual guide only. |
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Figure 8
Variation of thickness (left axis) and refractive index (right axis) as a function of the dose for an MTES-TEOS hybrid film. The lines are a visual guide only. |