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Figure 9
(a) Power density spectrum of synchrotron light at the Elettra Deep X-ray Lithography beamline. (b) Normalized transmittance of photons as a function of incident photon energy (eV) calculated for a silica dense film of thickness 0.1 µm (black line), 0.5 µm (red line) and 1 µm (blue line).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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