Figure 3
The total (aberration and Gaussian) linewidth ΔE depending on the Δα vertical acceptance without and with the a3 coefficient (optimized at 930 eV) for energies of 930 eV (two upper curves) and 530 eV in the MA mode (two lower ones, see text). Optimization of a3 dramatically increases the maximal illumination and thus aberration-limited Δα even away from Eref. |