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Figure 1
Area doses and exposure windows for dense lines exposed in PMMA for 30 nm and 40 nm shrinkages in (a) 540 nm-thick PMMA and (b) 1.1 µm PMMA. The dashed lines show the doses (typically 10–20% above the clearing doses) that were used in exposures of FZPs.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 18| Part 3| March 2011| Pages 442-446
doi:10.1107/S0909049511002366
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