Figure 2
Scanning electron microscope images of Au FZPs fabricated by exposing (a, b) 540 nm- and (c, d) 1.1 µm-thick PMMA and filling the developed trenches with Au by electroplating. (a) 200 µm-diameter FZP with a 50 nm outermost zone. The inserts present the outermost regions (tilts 0° and 45°). (b) 600 µm-diameter FZP with a 50 nm outermost zone. The insert presents the outermost region. (c) 200 µm-diameter FZP with a 70 nm outermost zone. The insert presents the outermost regions (tilt 60°). (d) 30 µm-diameter FZP with a 70 nm outermost zone (tilt 55°). |