Figure 5
Spatially resolved DE measurement. (a) The FZP is illuminated through a pinhole and the focused intensity is filtered by an OSA in the focus of the FZP. (b) The FZP and OSA are removed and the incoming intensity is measured. (c) Spatially resolved diffraction efficiency of a 500 nm-thick 100 µm-diameter FZP with an outermost zone of 50 nm at 6.2 keV photon energy. |