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Figure 3
(a) Simulated three-dimensional reciprocal-space map of a SiGe island on Si(001) showing the diffuse scattering close to the Si(004) Bragg peak, the substrate crystal truncation rod, and the signal of the SiGe island including the CTRs of the (111) side facets of the pyramid. The semi-transparent plane represents the projection of the two-dimensional detector in the reciprocal space at the measured Bragg angle. (b) Simulated and (c) experimentally measured two-dimensional diffraction map showing similar features.

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SYNCHROTRON
RADIATION
ISSN: 1600-5775
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