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Figure 5
Prolonged simulation of the maximal temperature growth for the 1 µm-thick slab of Si3N4 support for different parameters of heat convection and thermal radiation emissivity . The solid line denotes the ambient conditions with surface emissivity coefficients, SiN = 0.2, PMMA = 0.9, the dot–dashed line denotes conditions with emissivity SiN = 0.02, PMMA = 0.09 and heat conductivity h1 = [0.21 \times \left({T - T_\infty } \right)^{5/4}] J m−2 s−1; the dashed line with diamond marks denotes conditions with heat conductivity h2 = [0.021 \times \left({T - T_\infty } \right)^{5/4}] J m−2 s−1 and = 0.002.

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