Figure 5
Prolonged simulation of the maximal temperature growth for the 1 µm-thick slab of Si3N4 support for different parameters of heat convection and thermal radiation emissivity ∊. The solid line denotes the ambient conditions with surface emissivity coefficients, ∊SiN = 0.2, ∊PMMA = 0.9, the dot–dashed line denotes conditions with emissivity ∊SiN = 0.02, ∊PMMA = 0.09 and heat conductivity h1 = J m−2 s−1; the dashed line with diamond marks denotes conditions with heat conductivity h2 = J m−2 s−1 and ∊ = 0.002. |