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Figure 4
(a) The polished and unpolished exit side of the waveguide slices are polished, illustrating the beneficial effect of the focused ion beam technique in cleaning the optical layers. In the scanning electron microscopy images (b) and (c), the 35 nm C and 9 nm C guiding layers along with the interlayers are clearly identified (magnification 200k× and 300k×, respectively).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 19| Part 2| January 2012| Pages 227-236
doi:10.1107/S0909049511051983
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