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Figure 6
(a) SEM image of a hexagonally patterned silicon substrate. (b) Scanning force microscope image of the in-plane block copolymer structure adjacent to the edge of the confining well. (c) GISAXS pattern taken at an incident angle of 0.195° and an in-plane angle Φ = 0°. (d) I(2θ,Φ) constructed from the integrated line profiles like that defined by the two horizontal white lines shown in (c). (e) is a I(Φ) line-cut for the (10) diffraction. (f) shows the (11) and (20) in-plane diffraction profiles centered at the (11) and (20) peak positions. The dotted line is the resolution function. Figure adapted with permission from Stein et al. (2007b ![]() |