Figure 4
Two-dimensional X-ray diffraction patterns (upper row), reconstructed three-dimensional reciprocal-space maps (central row), and (qx, qz) cuts through the in situ 3D-RSMs at central qy (lower row) for (a) a pristine SiGe island and (b)–(d) the same SiGe island at different deformation stages. The position of the Si(004) Bragg reflection and the signal of the SiGe island is indicated by dashed lines. The dotted lines highlight the CTRs originating from the island side facets. |