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Figure 6
(a) Photon intensity spectra and (b) ratio of the photon intensity measured after in situ SR-activated oxygen cleaning to that measured before the cleaning; the measurements were made with the 300 lines mm−1 VLSG and M3. |
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Figure 6
(a) Photon intensity spectra and (b) ratio of the photon intensity measured after in situ SR-activated oxygen cleaning to that measured before the cleaning; the measurements were made with the 300 lines mm−1 VLSG and M3. |