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Figure 7
(a) Photon intensity spectra and (b) ratio of the photon intensity measured after in situ SR-activated oxygen cleaning to that measured before the cleaning; the measurements were performed with the 1000 lines mm−1 VLSG and M3′. |
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Figure 7
(a) Photon intensity spectra and (b) ratio of the photon intensity measured after in situ SR-activated oxygen cleaning to that measured before the cleaning; the measurements were performed with the 1000 lines mm−1 VLSG and M3′. |