Figure 13
For the I15 VFM, (a) best measured slope error before and after repair of the sag compensator. (b) Two consecutive pencil-beam scans after the repair, showing both excellent reproducibility and low remaining slope errors after application of the optimization procedure. (c) Scan of vertical focal profile with 20 µm pinhole taken after repair of the sag compensator and optimization of the motors. (d) Image taken by the in-house X-ray camera of the focused beam that was measured with the pinhole scan. This image has the same size and scale as those in Fig. 11. Note that in both the pinhole scan and the image the whole length of the mirror was illuminated. |