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Figure 4
(a) STXM OD image (288.4 eV) of an annealed PMMA sample patterned with various doses of 300 eV X-rays. (b) Plot of the OD at 288.4 eV values of individual patterned areas versus dose for different dose rates ranging from 73 to 1230 MGy s−1. In each case the OD at 288.4 eV exponentially decreases with a critical dose of 62 ± 8 MGy derived from the indicated fit (solid line) to the average of all data sets. The separate data sets all agree within measurement uncertainty.

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