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Figure 4
(a) STXM OD image (288.4 eV) of an annealed PMMA sample patterned with various doses of 300 eV X-rays. (b) Plot of the OD at 288.4 eV values of individual patterned areas versus dose for different dose rates ranging from 73 to 1230 MGy s−1. In each case the OD at 288.4 eV exponentially decreases with a critical dose of 62 ± 8 MGy derived from the indicated fit (solid line) to the average of all data sets. The separate data sets all agree within measurement uncertainty.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 19| Part 6| November 2012| Pages 976-987
https://doi.org/10.1107/S0909049512034486
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