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Figure 5
(a) Atomic force micrograph of developed annealed PMMA showing several 600 nm × 600 nm areas patterned with various doses of 300 eV X-rays. (b) Measured heights of several `cross-linked' PMMA areas plotted versus dose for as-spun, vacuum-dried (343 K, 2 × 10−2 torr, 24 h) and annealed (423 K, 1 h) samples.

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