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Figure 5
(a) Atomic force micrograph of developed annealed PMMA showing several 600 nm × 600 nm areas patterned with various doses of 300 eV X-rays. (b) Measured heights of several `cross-linked' PMMA areas plotted versus dose for as-spun, vacuum-dried (343 K, 2 × 10−2 torr, 24 h) and annealed (423 K, 1 h) samples.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 19| Part 6| November 2012| Pages 976-987
https://doi.org/10.1107/S0909049512034486
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